solar-semi

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solar-semi systems are based on standardized platforms. Processing and handling of fragile substrates. Semiconductor-, MEMS, piezoMEMS, OLED display, R&D. Lithography processing equipment. Spin coating, spray coating, baking, priming, developing, substrate cleaning, lift-off, stripping. Various substrate sizes and materials. Coating wafers on both sides. 100 % edge handling capability.

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