HamASensors.com

Title

Contact Information - CyberOptics Semiconductor

Description

CyberOptics Semiconductor combines laser- and vision-based technologies to deliver compelling solutions that boost yields and increase throughput in the semiconductor market. Industry leading product lines include WaferSense™ Auto Leveling Sensors, wafer mapping sensors and Imagenation frame grabbers.

WaferSense™Auto Leveling Sensor (ALS) is a vacuum compatible, wireless, wafer-like instrument that can be placed in cassettes, FOUPs, on end effectors, aligners and in process chambers to ensure all fab stations are level and coplanar. It reduces tool downtime by enabling fast and accurate tool setup and maintenance because its wireless, wafer-like design permits hands-off leveling measurements.

Wafer mapping sensors enable quick and reliable detection of semiconductor wafers and slotting errors in cassettes or FOUPs. The EX-Q provides reliable detection of bright, dark, coated and thin wafers. The EX-Q wafer mapping sensor is compatible with flatted or notched wafers of any size. Upgrading to the EX-Q from previous sensors (HAMA Sensors' DD, ZX, WX and CSI's EX) is quick and easy. The EX-QS is the functionally equivalent to the EX-Q, but is packaged in a smaller case to accommodate applications where the space is limited.

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Contact

Administrative:

GOLDEN VALLEY MN
US 55416-1040
(763) 542-5828


Registrant:

Hama Sensors, Inc.
Redwood City CA
US 94063

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