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The stokes waferskan ellipsometer model LSE-WS measures 49 sites on a 300mm wafer in less than 49 seconds. It uses advanced technology to give precise 2D/3D images of film thickness and index.
The stokes waferskan ellipsometer model LSE-WS measures 49 sites on a 300mm wafer in less than 49 seconds. It uses advanced technology to give precise 2D/3D images of film thickness and index.