PrimaxXinc.com
About PrimaxXinc.com
Primaxx is the world leader in reduced pressure, residue-free MEMS dry etch release, a critical buried oxide etch step which "releases" the moving components of challenging MEMS device designs. Combining anhydrous HF gas and alcohol vapor at reduced pressure provides a wide, stable process window that can address different oxide compositions and thicknesses while maintaining high selectivity to other common materials found in MEMS designs including aluminum.
